Permeable gas assembly for gas delivery

Details Permeable gas assembly for gas delivery Permeable gas assembly for gas delivery

2008-05-13

2008-05-13

Hepperle, Stephen M. (Department: 3753)

Fluid handling

Processes

C137S505390, C137S625330, C251S127000

Reexamination Certificate

active

11214165

ABSTRACT:
A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.

REFERENCES:
patent: 1645601 (1927-10-01), Lee
patent: 2887129 (1959-05-01), Stear
patent: 3682437 (1972-08-01), Miller
patent: 4397331 (1983-08-01), Medlar
patent: 4398563 (1983-08-01), Kay et al.
patent: 4429714 (1984-02-01), Hughes et al.
patent: 4436098 (1984-03-01), Kaufman
patent: 5518528 (1996-05-01), Tom et al.
patent: 5628496 (1997-05-01), Chamberlin
patent: 5704965 (1998-01-01), Tom et al.
patent: 5704967 (1998-01-01), Tom et al.
patent: 5707424 (1998-01-01), Tom et al.
patent: 6089027 (2000-07-01), Wang et al.
patent: 2004/0107997 (2004-06-01), Tom
patent: 2004/0206241 (2004-10-01), Tempel et al.
patent: 41 37 137 (1993-05-01), None
Machado, R.M., et al. “Novel Subatmospheric Pressure Gas Sources for Ion Impanters” May 26, 2005, Engineering Research Center (ERC) TeleSeminar, Electronics Technology Department, Air Products and Chemicals, Inc., Allentown, PA 18195.

Affiliated with

Also associated with

Rating

Permeable gas assembly for gas delivery does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Permeable gas assembly for gas delivery, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Permeable gas assembly for gas delivery will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3918053