Performing OPC on structures with virtual edges

Details Performing OPC on structures with virtual edges Performing OPC on structures with virtual edges

2005-02-24

2008-12-02

Young, Christopher G (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S005000

Reexamination Certificate

active

07459248

ABSTRACT:
A method for compensating for optical distortions occurring in regions associated with non-phase-shifting regions in a mask or reticle. OPC or other resolution enhancement techniques are performed on one or more edge segments associated with adjacent phase-shifting regions in order to compensate for edge position errors occurring in areas corresponding to non-phase-shifting regions.

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