Performance evaluation method for plasma processing...

Details Performance evaluation method for plasma processing... Performance evaluation method for plasma processing...

2006-10-10

2006-10-10

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S065000, C702S075000, C438S017000

Reexamination Certificate

active

07120556

ABSTRACT:
The performance of a plasma processing apparatus which is disassembled, transferred, and reassembled is evaluated. The plasma processing apparatus has a plasma processing chamber having an electrode for exciting a plasma, a radiofrequency generator connected to the electrode, and an impedance matching circuit for performing the impedance matching between the plasma processing chamber and the radiofrequency generator. The performance of the apparatus is evaluated whether or not three times the first series resonant frequency of the plasma processing chamber is larger than the power frequency supplied to the plasma processing chamber.

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