Perfluoropolymer coated pellicles

Details Perfluoropolymer coated pellicles Perfluoropolymer coated pellicles

1989-05-19

1990-11-13

Herbert, Thomas J.

Stock material or miscellaneous articles

Sheet including cover or casing

Complete cover or casing

4284111, 428412, 428422, 428510, B32B 104, B32B 2708

Patent

active

049700995

ABSTRACT:
Pellicles having films bearing at least one coating of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluro (alkyl vinyl) ether, and further comprising iodo moieties.

REFERENCES:
patent: 3351619 (1967-11-01), Warnell
patent: 4035565 (1977-07-01), Apotheker et al.
patent: 4243770 (1981-01-01), Tatemoto et al.
patent: 4281092 (1981-07-01), Breazeale
patent: 4413094 (1983-11-01), Aufdermarsh, Jr.
patent: 4487903 (1984-12-01), Tatemoto et al.
patent: 4529784 (1985-07-01), Finlay

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