Pencil beam interferometer

Details Pencil beam interferometer Pencil beam interferometer

1983-05-04

1985-02-12

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

356376, G01B 902

Patent

active

044987730

ABSTRACT:
An interferometer which provides for the precise figure measure of optical surfaces through the interference of two pencil beams, reflected off the optical surface, comprises a laser for generating a laser beam which is split into two parallel beams by a beam splitter and a mirror, the two pencil beams are reflected off a second beam splitter, through an alignment invariant optical device and onto the optical surface to be measured. The two pencil beams are reflected and back-trace through the alignment invariant optical device, propagate through the second beam splitter and enter an optical lens which is capable of focusing two beams in its back focal plane where the interference of the two pencil beams takes place. This information is then relayed through optical spatial filter and optional micro objective into the readout section.

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patent: 3715165 (1973-02-01), Smith
patent: 3775582 (1973-11-01), Iceland
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patent: 4188122 (1980-02-01), Massie et al.
patent: 4208128 (1980-06-01), Thompson et al.
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patent: 4298283 (1981-11-01), Makosch et al.
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patent: 4353650 (1982-10-01), Sommarghen
Williams, "Quality Assurance of Aspheric Surfaces" Proc. SPIE. vol. 109, pp. 52-57, 1/1977.
Eastman, "The Scanning Fizeau Interferometer: an Automated Instrument for Characterizing Optical Surfaces" Optical Engineering, vol. 19, No. 6, pp. 810-814, 12/1980.
Hayes et al., "Testing of Nonlinear Diamond-turned Reflections", Applied Optics vol. 20, No. 2, pp. 235-239, 1/1981.

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