Pellicle structure and process for preparation thereof with diss

Details Pellicle structure and process for preparation thereof with diss Pellicle structure and process for preparation thereof with diss

1991-11-27

1997-07-01

Watkins, William

Stock material or miscellaneous articles

Structurally defined web or sheet

Including aperture

428 14, 428 68, 428344, 428346, 428349, 428355AC, 428421, 428510, 428520, 428192, 428422, 428212, 156108, 1563086, 430 5, 355 30, 427264, 427265, 427270, G03B 2728, B32B 324

Patent

active

056436548

ABSTRACT:
A pellicle structure comprises a frame having a vertical through opening and a pellicle film spread on the upper the upper end of the opening of the frame. The pellicle film has a coating layer comprising a coating agent formed at least on the inner surface thereof, and a bonding portion for bonding the end edge of the frame to the peripheral edge of the pellicle film through an adhesive layer. The coating agent, in the bonding portion, is dissolved or dispersed in the adhesive so that the pellicle substrate is directly contacted by and bonded to the adhesive. In forming this pellicle structure, an adhesive, capable of dissolving therein the coating agent which comprises the coating layer, is coated on the top end of the opening of the frame; the adhesive is contacted with the coating layer on the surface of the pellicle substrate, whereby the coating agent dissolves in the adhesive allowing direct contact of the adhesive with the pellicle substrate; and the adhesive is then cured, whereby the pellicle substrate is directly bonded to the frame without interposition of the coating layer.

REFERENCES:
patent: 4634270 (1987-01-01), Yokoo et al.
patent: 4657805 (1987-04-01), Fukumitsu et al.
patent: 4828640 (1989-05-01), Kaya et al.
patent: 4861402 (1989-08-01), Gordon
patent: 4878973 (1989-11-01), Ohtake et al.
patent: 4970099 (1990-11-01), Adams et al.
patent: 4996106 (1991-02-01), Nakagawa et al.
patent: 5059451 (1991-10-01), Ayou et al.
patent: 5061024 (1991-10-01), Keys
patent: 5085899 (1992-02-01), Nakagawa et al.
patent: 5100957 (1992-03-01), Oshima et al.

Affiliated with

Also associated with

Rating

Pellicle structure and process for preparation thereof with diss does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pellicle structure and process for preparation thereof with diss, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pellicle structure and process for preparation thereof with diss will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-595229