Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1995-07-10
1998-02-10
Allen, Stephone
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
25055945, 25055946, 356237, G01N 2188
Patent
active
057171980
ABSTRACT:
A pellicle reflectivity monitoring system comprising a radiation source for directing radiation through a pellicle to an object to be inspected, a sensor device positioned to receive the portion of the radiation reflected by the pellicle, a processor, responsive to the sensor device, for determining the intensity of the portion of the radiation reflected by the pellicle, and a lens assembly, positioned in an optical path between the pellicle and the sensor device, for directing the portion of the radiation reflected by pellicles of different heights onto the sensor device. A comparator device compares the intensity of the radiation directed at the object to be inspected with the intensity of the portion of the radiation reflected by the pellicle and outputs a correction factor based on the comparison in order to compensate for the portion of the radiation reflected by the pellicle.
REFERENCES:
patent: 4999510 (1991-03-01), Hayano et al.
patent: 5072128 (1991-12-01), Hayano et al.
patent: 5416594 (1995-05-01), Gross et al.
Allen Nicholas
Boudour Abdu
Broude Sergey V.
Chase Eric
Johnson Carl
Allen Stephone
QC Optics, Inc.
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