Pellicle, producing method thereof and adhesive

Details Pellicle, producing method thereof and adhesive Pellicle, producing method thereof and adhesive

2007-10-16

2007-10-16

McClendon, Sanza L (Department: 1711)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

C522S150000, C522S149000, C522S153000, C522S156000, C522S155000, C522S184000, C522S185000, C522S186000, C522S187000, C428S3550RA, C428S3550AC, C428S3550EN, C428S014000, C428S442000, C428S441000

Reexamination Certificate

active

10026805

ABSTRACT:
A pellicle comprises a pellicle film and a pellicle frame for supporting the pellicle film, wherein the pellicle film is adhered to the pellicle frame through an adhesive layer comprising a fluorine-containing polymer and a substance resulting from curing of an ultraviolet-curing fluorine-containing monomer. A producing method of a pellicle including a pellicle film and a pellicle frame for supporting the pellicle film, comprises a step of adhering the pellicle film to the pellicle frame through an adhesive comprising a fluorine-containing polymer and an ultraviolet-curing fluorine-containing monomer.

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