Pellicle pasting system and method

Details Pellicle pasting system and method Pellicle pasting system and method

1997-05-16

1999-03-30

Osele, Mark A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156281, 156379, 156556, 3562372, 3562374, 25055941, B32B 3100

Patent

active

058883274

ABSTRACT:
A pellicle pasting system and method pastes a pellicle on a mask. The system includes a washing apparatus to wash the mask; a first mask transport apparatus to transport the mask washed by the washing apparatus; a first inspection apparatus to inspect whether foreign objects are attached to the mask received from the first mask transport apparatus; a second mask transport apparatus to transport the mask when the first inspection apparatus determines that the foreign objects are substantially absent from the mask; and a pellicle pasting apparatus to paste the pellicle on the mask received from the second mask transport apparatus.

REFERENCES:
patent: 4422547 (1983-12-01), Abe et al.
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4716299 (1987-12-01), Tanaka et al.
patent: 4999511 (1991-03-01), Kohno
patent: 4999671 (1991-03-01), Iizuka
patent: 5314564 (1994-05-01), Kobayashi
patent: 5591985 (1997-01-01), Tsuji et al.

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