Pellicle mounting apparatus

Details Pellicle mounting apparatus Pellicle mounting apparatus

1992-09-25

1994-05-10

Ball, Michael W.

Photocopying

Projection printing and copying cameras

Detailed holder for original

156556, G03B 2762

Patent

active

053112504

ABSTRACT:
A pellicle mounting apparatus adheres a pellicle frame to a surface of a reticle glass under pressure. The apparatus includes a reticle glass support device for supporting the reticle glass and pellicle frame support device for supporting the pellicle frame. An elastic pressure member is provided on the pellicle frame support device in contact with the pellicle frame along a periphery thereof. The pressure member has a sufficiently small reaction to deformation under the pressure applied to the pellicle frame as compared with the pressure. A pressurizing device applies fluid pressure uniformly to the periphery of the pellicle frame via the elastic pressure member.

REFERENCES:
patent: 4443098 (1984-04-01), Walwyn et al.
patent: 4637713 (1987-01-01), Shulenberger et al.
patent: 4897966 (1990-02-01), Takahashi

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