Pellicle mounting apparatus

Details Pellicle mounting apparatus Pellicle mounting apparatus

1985-09-27

1987-01-20

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for original

156556, 355125, 355133, 430 5, 430961, G03B 2762, G03B 2764, G03F 900

Patent

active

046377131

ABSTRACT:
A pellicle mounting apparatus characterized by a pair of pellicle holder assemblies positioned on either side of a photomask holder assembly. A drive mechanism is coupled between the two pellicle holder assemblies to exert a simultaneous force on the two assemblies to drive them towards or away from the photomask holder assembly. An alignment assembly including a pair of telescopes are first aligned with pellicle holder assemblies, and then the photomask is adjusted to align it with the telescopes. Once the pellicle holder assemblies and photomask holder assembly are properly aligned, pellicles can be repeatedly and accurately attached to opposing sides of a series of photomasks.

REFERENCES:
patent: 3811893 (1974-05-01), Jannssen et al.
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4093378 (1978-06-01), Horr et al.
patent: 4334472 (1982-06-01), Back et al.
patent: 4390273 (1983-06-01), Loebach et al.
patent: 4423954 (1984-01-01), Curti
patent: 4548493 (1985-10-01), Mayfield
IBM Technical Disclosure Bulletin, "Package Mask for Photolithography", G. G. Via, vol. 18, No. 10, Mar. 1976, pp. 3360-3361.

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