Pellicle distortion reduction

Details Pellicle distortion reduction Pellicle distortion reduction

2006-06-13

2006-06-13

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07061590

ABSTRACT:
The invention provides systems and a method for reducing pellicle distortion. One feature of the invention reduces distortion of a pellicle by providing an airtight mounting structure for coupling a pellicle to a mask; and a port on the mounting structure though which a pressure difference can be created between the interior portion and an exterior environment. Hence, distortion can be reduced by controlling the pressure in the interior portion between the pellicle, the pellicle mounting structure and the mask. Another feature places an aerodynamic fairing adjacent the mask to reduce aerodynamic drag and, hence, suppress turbulent air flow over the pellicle. The features can be used separately or in combination.

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patent: 6055040 (2000-04-01), Sego
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patent: 6788392 (2004-09-01), Nakano
patent: 6791661 (2004-09-01), Sato
patent: 2003/0016338 (2003-01-01), Yasuda et al.

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