Pellicle cover for projection printing system

Details Pellicle cover for projection printing system Pellicle cover for projection printing system

1977-12-05

1978-12-26

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for original

355 53, G03B 2762

Patent

active

041313631

ABSTRACT:
In a projection printing system the pattern mask, whose image is projected onto a light sensitive layer, is protected with a thin, 0.2-6 micron thick, transparent film or pellicle which is positioned an optically large distance of about 1-125 mm from the mask surface by a spacer member. Any dirt particles on the surface of the pellicle will be out of focus and are not printed in the light sensitive layer. A pellicle can also be employed to protect the light sensitive layer at the image plane.

REFERENCES:
patent: 3824014 (1974-07-01), Abita
patent: 4063812 (1977-12-01), Abraham et al.
IBM Technical Disclosure Bulletin, vol. 18, No. 10, Mar. 1976, pp. 3360-3361, "Package Mask for Photolithography".
IBM Technical Disclosure Bulletin, vol. 15, No. 10, Mar. 1973, p. 3012, "Fixed Gap for Proximity Printing".
IBM Technical Disclosure Bulletin, vol. 17, No. 8, Jan. 1975, p. 2267, "Integrated Circuit Fabrication Involving Projection Exposure of Photoresist".

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