Stock material or miscellaneous articles – Display in frame or transparent casing; or diorama including... – Peripheral enclosure or frame
Patent
1995-04-17
1996-06-25
Thomas, Alexander S.
Stock material or miscellaneous articles
Display in frame or transparent casing; or diorama including...
Peripheral enclosure or frame
428131, 355 30, G03F 100, G03F 900
Patent
active
055298192
ABSTRACT:
A pellicle for isolating a photomask pattern from particulate contaminants. The pellicle includes a peripheral frame having at least one vent structure for the passage of a gaseous substance between the interior of the frame and the atmosphere outside of the frame. The vent structure is configured for removal of particulate contaminants from the gaseous substance before the gaseous substance flows into the interior of the frame. The vent structure includes at least one exterior passageway extending between two openings in the outer surface of the frame and at least one interior passageway extending inwardly from the exterior passageway to an opening in the inner surface of the frame.
REFERENCES:
patent: 4697701 (1987-10-01), Ying
patent: 4737387 (1988-04-01), Yin
patent: 4833051 (1989-05-01), Imamura
patent: 5305878 (1994-04-01), Yen
patent: 5344677 (1994-09-01), Hong
Inko Industrial Corporation
Thomas Alexander S.
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