Pellicle

Details Pellicle Pellicle

1988-11-04

1991-02-26

Herbert, Thomas J.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Adhesive outermost layer

428422, 428509, B32B 712, B32B 2732

Patent

active

049961063

ABSTRACT:
A pellicle is compose of a pellicle frame, a pellicle film spread on one side face of the pellicle frame, and a tacky substance layer having a high light transmittance formed on the inner side face of the pellicle film.

REFERENCES:
patent: 4470508 (1984-09-01), Yen
patent: 4833051 (1989-05-01), Imamura
D. W. Fisher et al., IBM Technical Disclosure Bulletin, vol. 20, No. 8, pp. 3000, Jan. 1978.
Patent Abstracts of Japan, (Japanese Published Patent Appln. No. 61-241756) vol. 11, No. 91 (P-558) [2538] Mar. 23, 1987.

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