Peeling device and peeling method

Details Peeling device and peeling method Peeling device and peeling method

2007-02-06

2007-02-06

Osele, Mark A. (Department: 1734)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C156S583200, C438S464000, C438S976000

Reexamination Certificate

active

11038479

ABSTRACT:
A peeling device11includes an adsorber15having an adsorbing face20A that adsorbs and retains a wafer W, and a peeling element17that holds a protective sheet H stuck to the wafer W, and peels off the protective sheet H from the wafer W through moving relatively to the adsorber15. The adsorber15and the peeling element17are arranged so as to peel off the protective sheet H from the wafer W intermittently through moving relatively to each other while a peeling operation and a counter-peeling operation are performed alternately.

REFERENCES:
patent: 3765289 (1973-10-01), Gerber et al.
patent: 4732642 (1988-03-01), Ametani
patent: 5000814 (1991-03-01), Sumi
patent: 5106450 (1992-04-01), Freisitzer et al.
patent: 5358591 (1994-10-01), Candore
patent: 5540809 (1996-07-01), Ida et al.
patent: 5938890 (1999-08-01), Schlinkmann et al.
patent: 5971257 (1999-10-01), Yang
patent: 6500298 (2002-12-01), Wright et al.
patent: 6715524 (2004-04-01), Chen et al.
patent: 2004/0238118 (2004-12-01), Miyamoto
patent: 2000-315679 (2000-11-01), None

Affiliated with

Also associated with

Rating

Peeling device and peeling method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Peeling device and peeling method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Peeling device and peeling method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3889043