Patterning substrates employing multi-film layers defining...

Details Patterning substrates employing multi-film layers defining... Patterning substrates employing multi-film layers defining...

2007-04-17

2007-04-17

Toledo, Fernando L. (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S703000, C438S705000, C430S316000, C257SE21038

Reexamination Certificate

active

10946574

ABSTRACT:
The present invention features a method of patterning a substrate that includes forming, on the substrate, a multi-layer film with a surface, an etch rate interface and an etch-differential interface. The etch-differential interface is defined between the etch rate interface and the surface. A recorded pattern is transferred onto the substrate defined, in part, by the etch-differential interface.

REFERENCES:
patent: 3795534 (1974-03-01), Mehalso et al.
patent: 4038110 (1977-07-01), Feng
patent: 4267212 (1981-05-01), Sakawaki
patent: 4389281 (1983-06-01), Anantha et al.
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4512848 (1985-04-01), Deckman et al.
patent: 4657845 (1987-04-01), Frchet et al.
patent: 4665007 (1987-05-01), Cservak et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4731155 (1988-03-01), Napoli et al.
patent: 4741926 (1988-05-01), White et al.
patent: 4794021 (1988-12-01), Potter
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4943516 (1990-07-01), Kamayachi et al.
patent: 4959252 (1990-09-01), Bonnebat et al.
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 5015602 (1991-05-01), Van Der Plas et al.
patent: 5028366 (1991-07-01), Harakal et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5110514 (1992-05-01), Soane
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5212114 (1993-05-01), Grewal et al.
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240550 (1993-08-01), Boehnke et al.
patent: 5259926 (1993-11-01), Kuwabara et al.
patent: 5276126 (1994-01-01), Rogler
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5330883 (1994-07-01), Garza et al.
patent: 5425848 (1995-06-01), Haisma et al.
patent: 5434107 (1995-07-01), Paranjpe
patent: 5480047 (1996-01-01), Tanigawa et al.
patent: 5488007 (1996-01-01), Kim et al.
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5545367 (1996-08-01), Bae et al.
patent: 5597438 (1997-01-01), Grewel et al.
patent: 5601641 (1997-02-01), Stephens
patent: 5669303 (1997-09-01), Maracas et al.
patent: 5700626 (1997-12-01), Lee et al.
patent: 5743998 (1998-04-01), Park
patent: 5772905 (1998-06-01), Chou
patent: 5776748 (1998-07-01), Singhvi et al.
patent: 5820769 (1998-10-01), Chou
patent: 5849209 (1998-12-01), Kindt-Larsen et al.
patent: 5849222 (1998-12-01), Jen et al.
patent: 5888650 (1999-03-01), Calhoun et al.
patent: 5893750 (1999-04-01), Hause et al.
patent: 5905104 (1999-05-01), Eklund et al.
patent: 5907782 (1999-05-01), Wu
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5954997 (1999-09-01), Kaufman et al.
patent: 5956216 (1999-09-01), Chou
patent: 5962191 (1999-10-01), Nozaki et al.
patent: 5986330 (1999-11-01), Kalnitsky et al.
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6046056 (2000-04-01), Parce et al.
patent: 6071372 (2000-06-01), Ye et al.
patent: 6074827 (2000-06-01), Nelson et al.
patent: 6096655 (2000-08-01), Lee et al.
patent: 6150190 (2000-11-01), Stankus et al.
patent: 6218316 (2001-04-01), Marsh
patent: 6232175 (2001-05-01), Liu et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6309580 (2001-10-01), Chou
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6334960 (2002-01-01), Willson et al.
patent: 6342097 (2002-01-01), Terry et al.
patent: 6355198 (2002-03-01), Kim et al.
patent: 6387787 (2002-05-01), Mancini et al.
patent: 6391217 (2002-05-01), Schaffer et al.
patent: 6426288 (2002-07-01), Meikle
patent: 6451703 (2002-09-01), Liu et al.
patent: 6455411 (2002-09-01), Jiang et al.
patent: 6468853 (2002-10-01), Balasubramanian et al.
patent: 6468896 (2002-10-01), Rohr et al.
patent: 6482742 (2002-11-01), Chou
patent: 6495430 (2002-12-01), Tsai et al.
patent: 6517977 (2003-02-01), Resnick et al.
patent: 6517995 (2003-02-01), Jacobson et al.
patent: 6518189 (2003-02-01), Chou
patent: 6562465 (2003-05-01), Nakashima et al.
patent: 6566258 (2003-05-01), Dixit et al.
patent: 6580172 (2003-06-01), Mancini et al.
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6686271 (2004-02-01), Raaijmakers et al.
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6703190 (2004-03-01), Elian et al.
patent: 6713238 (2004-03-01), Chou et al.
patent: 6716767 (2004-04-01), Shih et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6730256 (2004-05-01), Bloomstein et al.
patent: 6737202 (2004-05-01), Gehoski et al.
patent: 6743713 (2004-06-01), Mukher-Hee-Roy et al.
patent: 6759325 (2004-07-01), Raaijmakers et al.
patent: 6767983 (2004-07-01), Fujiyama et al.
patent: 6770852 (2004-08-01), Stegner
patent: 6776094 (2004-08-01), Whitesides et al.
patent: 6777170 (2004-08-01), Bloomstein et al.
patent: 6809356 (2004-10-01), Chou
patent: 6814879 (2004-11-01), Shibata
patent: 6820677 (2004-11-01), Grinberg et al.
patent: 6828244 (2004-12-01), Chou
patent: 6849558 (2005-02-01), Schaper
patent: 6893975 (2005-05-01), Yue et al.
patent: 6894245 (2005-05-01), Hoffman et al.
patent: 6900881 (2005-05-01), Sreenivasan et al.
patent: 6908861 (2005-06-01), Sreenivasan et al.
patent: 6916584 (2005-07-01), Sreenivasan et al.
patent: 6932934 (2005-08-01), Choi et al.
patent: 6936194 (2005-08-01), Watts
patent: 6954275 (2005-10-01), Choi et al.
patent: 6986975 (2006-01-01), Sreenivasan et al.
patent: 7037639 (2006-05-01), Voisin
patent: 7041604 (2006-05-01), Miller et al.
patent: 7077992 (2006-07-01), Sreenivasan et al.
patent: 2002/0042027 (2002-04-01), Chou et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0167117 (2002-11-01), Chou
patent: 2002/0177319 (2002-11-01), Chou
patent: 2003/0034329 (2003-02-01), Chou
patent: 2003/0062334 (2003-04-01), Lee et al.
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0080472 (2003-05-01), Chou
patent: 2004/0007799 (2004-01-01), Choi et al.
patent: 2004/0008334 (2004-01-01), Sreenivasan et al.
patent: 2004/0009673 (2004-01-01), Sreenivasan et al.
patent: 2004/0021254 (2004-02-01), Sreenivasan et al.
patent: 2004/0021866 (2004-02-01), Watts et al.
patent: 2004/0022888 (2004-02-01), Sreenivasan et al.
patent: 2004/0029041 (2004-02-01), Shih et al.
patent: 2004/0029372 (2004-02-01), Jang et al.
patent: 2004/0029396 (2004-02-01), Zhang et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 2004/0046288 (2004-03-01), Chou
patent: 2004/0065252 (2004-04-01), Sreenivasan et al.
patent: 2004/0065976 (2004-04-01), Sreenivasan et al.
patent: 2004/0110856 (2004-06-01), Young et al.
patent: 2004/0118809 (2004-06-01), Chou et al.
patent: 2004/0124566 (2004-07-01), Sreenivasan et al.
patent: 2004/0131718 (2004-07-01), Chou et al.
patent: 2004/0137734 (2004-07-01), Chou et al.
patent: 2004/0156108 (2004-08-01), Chou et al.
patent: 2004/0188381 (2004-09-01), Sreenivasan
patent: 2004/0192041 (2004-09-01), Jeong et al.
patent: 2004/0197843 (2004-10-01), Chou et al.
patent: 2004/0211754 (2004-10-01), Sreenivasan
patent: 2004/0224261 (2004-11-01), Resnick et al.
patent: 2004/0250945 (2004-12-01), Zheng et al.
patent: 2005/0037143 (2005-02-01), Chou et al.
patent: 2005/0072755 (2005-04-01), McMackin et al.
patent: 2005/0192421 (2005-09-01), Xu et al.
patent: 2005/0199341 (2005-09-01), Delp et al.
patent: 2005/0253307 (2005-11-01), Sreenivasan
patent: 2005/0260848 (2005-11-01), Sreenivasan
patent: 2006/0076717 (2006-04-01), Sreenivasan et al.
patent: 2006/0077374 (2006-04-01), Sreenivasan et al.
patent: 1-196749 (1989-08-01), None
patent: 02-24848 (1990-01-01), None
patent: 02-92603 (1990-04-01), None
patent: 02192045 (1990-07-01), None
patent: WO 87/02935 (1987-05-01), None
patent: WO 99/05724 (1999-02-01), None
patent: WO 00/21689 (2000-04-01), None
patent: WO 01/47003 (2001-06-01), None
patent: WO 02/07199 (2002-01-01), None
patent: WO 03/010289 (2003-02-01), None
patent: WO 03/079416 (2003-09-01), None
patent: WO 03/099536 (2003-12-01), None
patent: WO 2004/114016 (2004-12-01), None
patent: WO 2005/031299 (2005-04-01), None
patent: WO 2005/031855 (2005-04-01), None
U.S. Appl. No. 10/843,194, filed May 11, 2004, Sreenivasan et al.
U.S. Appl. No. 10/946,159, filed Sep. 21, 2004, Miller et al.
U.S. Appl. No. 10/946,577,

Affiliated with

Also associated with

Rating

Patterning substrates employing multi-film layers defining... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Patterning substrates employing multi-film layers defining..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Patterning substrates employing multi-film layers defining... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3789682