Patterning solution deposited thin films with self-assembled...

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Reexamination Certificate

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C156S232000, C156S242000, C427S096400, C427S261000, C428S914000, C216S049000, C438S738000

Reexamination Certificate

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06887332

ABSTRACT:
The present invention provides a method of forming a patterned thin film on a surface of a substrate having thereon a patterned underlayer of a self-assembled monolayer. The method comprises depositing a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate. The present invention further provides processes for preparing the self-assembled monolayer. The present invention still further provides solution-based deposition processes, such as spin-coating and immersion-coating, to deposit a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate.

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Manipulation of the Wettability of Surfaces on the 0.1- to 1-Micrometer Scale through Micromachining and Molecular Self-Asemblyby Abbott et al., in Science, vol. 257, Sep. 4, 1992, pp. 1380-1382.
Maskless photolithography: Embossed photoresist as its own optical elementby Paul et al., in Applied Physics Letters, vol. 73, No. 20, Nov. 16, 1998, pp. 2893-2895.
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