Patterning of solid state features by direct write...

Details Patterning of solid state features by direct write... Patterning of solid state features by direct write...

2007-08-29

2010-10-12

Fletcher, III, William Phillip (Department: 1715)

Coating processes

Nonuniform coating

C427S226000, C427S229000, C977S855000, C977S857000

Reexamination Certificate

active

07811635

ABSTRACT:
The present invention includes a method of fabricating organic/inorganic composite nanostructures on a substrate comprising depositing a solution having a block copolymer and an inorganic precursor on the substrate using dip pen nanolithography. The nanostructures comprises arrays of lines and/or dots having widths/diameters less than 1 micron. The present invention also includes a device comprising an organic/inorganic composite nanoscale region chemically bonded to a substrate, wherein the nanoscale region, wherein the nanoscale region has a nanometer scale dimension other than height.

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Moving beyond Molecules: Patterning Solid-State Features via Dip-Pen Nanolithography with Sol-Based Inks; Su, M.; Liu, X.; Li, S.-Y.; Dravid, V.P.; Mirkin, C.A.; J. Am. Chem. Soc.; (Communication); 2002; 124(8); 1560-1561; DOI: 10.1021/ja012502y; Published on Web Jan. 31, 2002.
Li, Y., et al., “Electrochemical AFM ‘Dip-Pen’ Nanolithography”, J. Am. Chem. Soc. vol. 123, pp. 2105-2106 (2001).

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