Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1983-12-27
1985-04-02
Lusignan, Michael R.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
156643, 1566591, 156668, 156904, 219121LM, 427 531, 427 541, 427 96, 430945, B44C 122, C03C 2506, C03C 1500, B05D 306
Patent
active
045087490
ABSTRACT:
A method for etching a polyimide body which involves directing U.V. radiation having a wavelength between about 240 to 400 nm. onto the body is described. The radiation is continued to be applied to the body for sufficient time to cause a direct etching of the body where the radiation impinges upon the body. The method is particularly useful where the U.V. radiation is passed through a mask located between the source of the ultraviolet radiation and the body so that a radiation pattern is projected onto the body where the direct etching takes place. The etching can be caused to produce openings having a positive slope in the radiation pattern upon the polyimide layer. The advantage of the positive slope is particularly great where a coating such as a metal layer is deposited over the remaining polyimide layer having the openings therein. The positive slope allows the complete filling of the openings.
REFERENCES:
patent: 4247496 (1981-01-01), Kawakami et al.
Koren et al., In GaAsP/InP Under Cut Mesa Laser with Planar Polyimide Passivation, App. Phys. Lett. 42(5), Mar. 1, 1983.
Raffel et al., Laser-Formed Connections Using Polyimide, App. Phys. Lett. 42(8), Apr. 15, 1983.
Andrew et al., Direct Etching of Polymeric Materials Using a Xe Cl Laser, App. Phys. Lett. 43(8), Oct. 15, 1983.
"Effective Deep Ultraviolet Photoetching of Polymethyl Methacrylate by an Excimer Laser", by Y. Kawamura et al., in Appl. Phys. Lett. 40(5) Mar. 1, 1982, pp. 374-375.
"Direct Etching of Resists by U.V. Light" by N. Ueno, et al., Ja. J of App. Phys, vol. 20, No. 10, Oct. 1981, pp. L709-712.
Brannon James H.
Lankard Sr. John R.
International Business Machines - Corporation
Lusignan Michael R.
Saile George O.
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