Patterning metal layers

Details Patterning metal layers Patterning metal layers

2006-04-04

2009-12-08

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C257SE21596

Reexamination Certificate

active

07629261

ABSTRACT:
A process for fabricating an electronic device comprising the step of patterning a metallic electrode to the electronic device by laser ablation followed by electroless plating, wherein the process of fabricating the electronic device comprises at least one other laser patterning step over the area of the metallic electrode performed after said step of patterning the metallic electrode.

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