Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-07-31
2010-06-15
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C359S295000
Reexamination Certificate
active
07738077
ABSTRACT:
A system and method are used to independently control multiple parameters of a patterned beam. This can be performed using a patterning device configured to pattern a beam of radiation comprising a controller and an array of stepped mirrors. The array comprises a plurality of sets of four of the stepped mirrors that are controlled with respect to each other. Adjacent ones of the stepped mirrors in each of the sets have perpendicular axes of rotation and perpendicular steps. In one example, the patterning device is used to patterned the beam of radiation, which patterned beam is projected onto an object. For example, the object can be a substrate (e.g., semiconductor substrate or flat panel display substrate) or a display device.
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Baselmans Johannes Jacobus Matheus
Tinnemans Patricius Aloysius Jacobus
Asfaw Mesfin T
ASML Netherlands B.V.
Mathews Alan A
Sterne Kessler Goldstein & Fox P.L.L.C.
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