Patterned magnetic layer on-chip inductor

Details Patterned magnetic layer on-chip inductor Patterned magnetic layer on-chip inductor

2005-04-21

2008-12-09

Enad, Elvin (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

Reexamination Certificate

active

07463131

ABSTRACT:
An on-chip inductor structure includes top and bottom metal plates that are formed to surround a conductor coil formed between the top and bottom plates, but is separated therefrom by intervening dielectric material. The top and bottom plates are preferably formed from a ferromagnetic alloy, e.g. Permalloy, and are subdivided into a plurality of space-apart segments, thereby reducing eddy currents. The number of segments is optimized based upon the process technology utilized to fabricate the structure. Preferably, a finite gap is formed between the top plate and the bottom plate, the height of the gap being chosen to adjust the total inductance of the structure.

REFERENCES:
patent: 4907346 (1990-03-01), Watanabe
patent: 4956636 (1990-09-01), Sansom et al.
patent: 6491229 (2002-12-01), Berney
patent: 7140092 (2006-11-01), Park et al.
patent: 2005/0140483 (2005-06-01), Wobben

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