Semiconductor device manufacturing: process – Having metal oxide or copper sulfide compound semiconductor...
Reexamination Certificate
2010-07-28
2011-10-25
Geyer, Scott B (Department: 2812)
Semiconductor device manufacturing: process
Having metal oxide or copper sulfide compound semiconductor...
C438S584000, C438S608000
Reexamination Certificate
active
08043889
ABSTRACT:
A chemical bath deposition (CBD) process is provided for forming a textured zinc oxide film pattern from a zinc oxide printed seed layer. The process provides a substrate and prints a zinc oxide seed layer in a pattern overlying the substrate. Using a CBD process, a textured zinc oxide film is grown overlying the zinc oxide seed layer pattern, where the textured zinc oxide film has a variation in film thickness of greater than 200 nanometers (nm). In one aspect, growing the textured zinc oxide film includes: preparing a ZnO precursor bath; maintaining a bath temperature of about 70 degrees C.; and, leaving the substrate in the bath for about an hour. In another aspect, growing the textured zinc oxide film includes forming a textured zinc oxide film with zinc oxide crystals having a pyramidal shape with a height of greater than 200 nm.
REFERENCES:
patent: 7285501 (2007-10-01), Mardilovich et al.
patent: 7691666 (2010-04-01), Levy et al.
patent: 2007/0020400 (2007-01-01), Chang
patent: 2009/0194160 (2009-08-01), Chin et al.
patent: 2010/0276003 (2010-11-01), Kawano et al.
patent: 2011/0079754 (2011-04-01), Hsieh et al.
Yang L. L. et al., Effective Way to Control the Size of Well-Aligned ZnO Nanorod Arrays With Two-Step Chemical Bath Deposition, Journal of Crystal Growth, 311 (2009) pp. 1046-1050, available online Dec. 24, 2008.
Kumar P. S. et al. Growth and Characterization of ZnO Nanostructured Thin Films by a Two Step Chemical Method, Applied Surface Science, 255 (2008) pp. 2382-2387, available online Aug. 3, 2008.
Wang et al., “Chemical bath deposition of textured ZnO thin film in aqueous/ethanolic solution”, Materials Letters (2008), 62(30), 4532-4534.
Wang et al. Influence of annealing temperature on the structural and optical properties of sol-gel perepared ZnO thin films', Phys. Stat. Sol. (a) 203, No. 10, 2418-2455 (200.
Hinch Garry
Ulmer Kurt
Geyer Scott B
Law Offices of Gerald Maliszewski
Maliszewski Gerald
Sharp Laboratories of America Inc.
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