Pattern writing apparatus and pattern writing method

Details Pattern writing apparatus and pattern writing method Pattern writing apparatus and pattern writing method

2005-02-22

2005-02-22

Tran, Huan (Department: 2861)

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

C347S255000

Reexamination Certificate

active

06859223

ABSTRACT:
An image recording apparatus (1) has a stage unit (2) for holding a substrate (9), an irradiation unit (4) having a plurality of irradiation parts (40) and a mechanism for relatively moving the stage unit (2) and the irradiation unit (4). An irradiation part (40) is provided with a DMD having a group of micromirrors for modulating a reflected light beam and a micro moving mechanism for moving the DMD relatively to the irradiation unit (4) in the X direction, thereby microscopically moving an irradiation position of the irradiation part (40) in the X direction. The irradiation part (40) is further provided with a zoom lens, thereby magnifying and reducing an image of the DMD on the substrate (9). By controlling a plurality of irradiation parts (40) parallelly and independently, the image recording apparatus (1) can write a fine pattern at high speed.

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