Pattern transfer apparatus

Details Pattern transfer apparatus Pattern transfer apparatus

1985-03-01

1986-12-23

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Focus or magnification control

250548, 356401, G03B 2752

Patent

active

046309225

ABSTRACT:
An apparatus for irradiating a first object so as to achieve at least one of alignment between the first object and a second object and transfer of a pattern of the first object onto the second object. The apparatus includes an optical device disposed in the path of the irradiating beam to correct or prevent any change in the optical path length depending on the thickness of the first object.

REFERENCES:
patent: 4275306 (1981-06-01), Kato et al.
patent: 4506977 (1985-03-01), Sato et al.

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