Pattern test apparatus including a plurality of pattern generato

Details Pattern test apparatus including a plurality of pattern generato Pattern test apparatus including a plurality of pattern generato

1985-10-31

1988-05-10

Zache, Raulfe B.

Boots, shoes, and leggings

364518, 364488, 364491, 371 27, 340747, 382 8, G06F 1100, G06F 1570, G01R 3128, G06K 900

Patent

active

047440473

ABSTRACT:
An apparatus for testing printed wiring patterns for use in combination with an apparatus including a plurality of dedicated pattern generators for generating arcuate wiring patterns. In contrast to the conventional LSI pattern inspection effected with design data being inputted, the apparatus can inspect the pattern including curved portions peculiar to the printed wiring pattern. Although the conventional LSI inspection technique involves an impracticably increased amount of design data, the invention allows the test or inspection to be performed at a high speed with an improved reliability and can be applied to the inspection of any pattern including arcuate patterns. By inputting graphic data in conformance with the order for generating patterns, pattern generation can be accomplished not only through ordinary raster scan but also by other various scanning methods.

REFERENCES:
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patent: 4498079 (1985-02-01), Ghosh et al.
patent: 4538232 (1985-08-01), Koyama
patent: 4584573 (1986-04-01), Ito
patent: 4614941 (1986-09-01), Jarvis
patent: 4620288 (1986-10-01), Welmers
patent: 4623256 (1986-11-01), Ikenaga et al.
patent: 4639919 (1987-01-01), Chang et al.
patent: 4641255 (1987-02-01), Hohmann
patent: 4644584 (1987-02-01), Nagashima et al.
"An Automatic Visual Inspection System for LSI Photomasks" by K. Okamoto et al., IEEE Seventh International Conference on Pattern Recognition Proceedings, Jul. 30-Aug. 2, 1984, Montreal, Canada, pp. 1361-1364.

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