Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1987-07-08
1989-03-28
Fields, Carolyn E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
2504923, 364491, G21K 500
Patent
active
048166928
ABSTRACT:
A system and an algorithmic method are provided for scanning an electron beam in a predetermined pattern over a surface, which is partitioned into a matrix of sub-fields. The system includes an electron beam, and it determines the boundary portions of that pattern in a selected sub-field of the matrix which extends into the next sequential adjacent sub-fields in the same row and column as the selected sub-field. The coordinates of the pattern boundary portion in the selected and the adjacent sub-fields are stored in a memory. The electron beam scans over the surface for fully exposing the surface with all portions of the predetermined pattern within the selected sub-field, except for the boundary portions. Then the boundary portions in the currently selected sub-field are spliced, i.e. partially exposed, as are the boundary portions of the adjacent sub-fields which extend into the currently selected sub-field. Portions of the spliced data are stored in a buffer for use in computing the data for the corresponding adjacent sub-fields. Then the coordinates of the pattern boundary portions in the previously selected sub-fields are deleted from the memory.
REFERENCES:
patent: 4099062 (1978-07-01), Kitcher
patent: 4494004 (1985-01-01), Mauer, IV et al.
patent: 4500789 (1985-02-01), Ban et al.
patent: 4523098 (1985-06-01), Noma
patent: 4538232 (1985-08-01), Koyama
Fields Carolyn E.
International Business Machines - Corporation
Jones II Graham S.
Miller John A.
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