Pattern projecting method

Details Pattern projecting method Pattern projecting method

1994-10-21

1997-05-06

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 77, H01L 21027

Patent

active

056276257

ABSTRACT:
A pattern projecting method is disclosed. The pattern projecting method has the step of illuminating a mask having a fine pattern formed therein with an exposure light and causing a transmitted light of the mask to be incident on a pupil of a projection optical system to project an image of the fine pattern onto a substrate, the illuminating step using an effective light source capable of achieving such light intensity distribution as to provide a predetermined light intensity in a central region of the pupil, a maximum light intensity in plural peripheral regions around the central region, and a light intensity lower than the maximum light intensity in a region connecting the plural regions.

REFERENCES:
patent: 5363170 (1994-11-01), Muraki
Patent Abstracts of Japan JP3 269 343, vol. 16, No.85, p. 1339, Feb. 28, 1992.

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