Image analysis – Pattern recognition – Feature extraction
Reexamination Certificate
2006-12-19
2006-12-19
Desire, Gregory (Department: 2624)
Image analysis
Pattern recognition
Feature extraction
C250S559220, C250S559360, C382S144000, C382S145000, C382S199000
Reexamination Certificate
active
07151855
ABSTRACT:
A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern; combining the edge points between the patterns to make a pair of edge points and calculating a distance between the edge points constituting each pair of edge points and an angle between a straight line which connects the edge point to the other edge point and an arbitrary axial line with respect to each pair of edge points to prepare a distance angle distribution map which is a distribution map of the calculated distance and angle of the pair of edge points; and evaluating at least one of a relation of shape between the patterns, a relation of size between the patterns, and a relative location between the patterns on the basis of the prepared distance angle distribution map.
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Desire Gregory
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
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