Pattern matching apparatus and scanning electron microscope...

Details Pattern matching apparatus and scanning electron microscope... Pattern matching apparatus and scanning electron microscope...

2005-08-22

2011-10-18

Tucker, Wesley (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S144000, C382S151000

Reexamination Certificate

active

08041104

ABSTRACT:
A pattern matching apparatus comprising: means for storing photographed image data of a semiconductor device; means for storing CAD data of said semiconductor device; an information input means for inputting information on the white band width contained in said image data; a pattern extracting means for extracting a pattern on the semiconductor device from said image data by using the white band width information; and a matching means for matching said pattern with the CAD data.

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Japanese Office Action, with partial translation, issued in Japanese patent Application No. 2008-150029, mailed Apr. 26, 2011.

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