Radiant energy – Means to align or position an object relative to a source or...
Patent
1980-12-19
1982-12-21
Anderson, Bruce C.
Radiant energy
Means to align or position an object relative to a source or...
2504922, H01J 3700
Patent
active
043651631
ABSTRACT:
This describes an automatic defect inspection system as could be applied to metallized masks or other patterns. The system causes each subfield to be individually aligned for inspection irrespective of the previous alignment of the pattern or any other sub-field. This is accomplished by scanning a preselected portion of each sub-field and adjusting the position of the scan based on the resulting signal while scanning a pre-established portion of the sub-field. In this way a portion of each sub-field is used as an alignment mark and stepping errors avoided.
Once alignment is achieved a probe, comparable to the size of the minimum defect to be detected is scanned over the sub-field with an overlapping pattern to find defects such as excessive metal, metal in improper places or points where the metal is missing.
REFERENCES:
patent: 3515877 (1970-06-01), Baxter et al.
patent: 3523495 (1970-08-01), Giedd et al.
patent: 3643098 (1972-02-01), Willis
patent: 3783228 (1974-01-01), Tarui et al.
patent: 3857041 (1974-12-01), Spicer
patent: 3908118 (1975-09-01), Micka
patent: 4264822 (1981-04-01), Ueno et al.
patent: 4286154 (1981-08-01), Okubo
"Automatic Pattern Positioning of Scanning Electron Beam Exposure", Miyauchi et al., IEEE Trans. on Electron Devices, vol. ED.-17, No. 6, Jun. 1970, pp. 450-457.
"Mask Inspection Using Electron-Beam Systems", Grobman, IBM Tech. Disclosure Bulletin, vol. 22, No. 12, May 1980, p. 5540.
Davis Donald E.
Moore Richard D.
Ryan Philip M.
Weber Edward V.
Anderson Bruce C.
International Business Machines - Corporation
Thornton Francis J.
LandOfFree
Pattern inspection tool - method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pattern inspection tool - method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pattern inspection tool - method and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-407902