Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-02-24
2009-12-01
Mariam, Daniel G (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S149000
Reexamination Certificate
active
07627165
ABSTRACT:
An image correction device for use in pattern inspection apparatus is disclosed. This device includes a pattern extraction unit for extracting a pattern, as a cut-and-paste pattern, from a pattern existence region of an inspection reference pattern image and a pattern image of a workpiece being tested. The device also includes a pattern pasting unit for pasting the cut-and-paste pattern in blank regions of the reference and under-test pattern images to thereby create a pasted reference pattern image and a pasted test pattern image. The device further includes an equation generator for generating by linear predictive modeling a set of simultaneous equations relative to the pasted reference and test pattern images, a parameter generator for solving these equations to obtain a model parameter(s), and a unit for creating a corrected pattern image by the linear predictive modeling using the model parameter(s).
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Nakatani Yuichi
Oaki Junji
Sugihara Shinji
Advanced Mask Inspection Technology Inc.
Mariam Daniel G
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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