Pattern inspection method and apparatus using linear...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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C382S149000

Reexamination Certificate

active

07627165

ABSTRACT:
An image correction device for use in pattern inspection apparatus is disclosed. This device includes a pattern extraction unit for extracting a pattern, as a cut-and-paste pattern, from a pattern existence region of an inspection reference pattern image and a pattern image of a workpiece being tested. The device also includes a pattern pasting unit for pasting the cut-and-paste pattern in blank regions of the reference and under-test pattern images to thereby create a pasted reference pattern image and a pasted test pattern image. The device further includes an equation generator for generating by linear predictive modeling a set of simultaneous equations relative to the pasted reference and test pattern images, a parameter generator for solving these equations to obtain a model parameter(s), and a unit for creating a corrected pattern image by the linear predictive modeling using the model parameter(s).

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Japanese Office Action for application No. 2006-227348, Aug. 25, 2009.

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