Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2005-11-04
2010-12-28
Barbee, Manuel L (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C702S081000, C382S144000
Reexamination Certificate
active
07860675
ABSTRACT:
The present invention has an object of realizing a defect inspection estimated at high accuracy by preparing a reference image that reflects the change of the blur with time from a sampled image and design data. The present invention comprises a point spread function estimating section23for estimating a point spread function from an observation image and design information, a convolution image generating section31for generating a convolution image by convoluting the point spread function relative to the design information and a reference image generating section33for generating a reference image from the convolution image obtained by the convolution image generating section. binary image relative to “chromium on quartz glass”.
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Machine translation of JP 08247738 A.
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Barbee Manuel L
Dickstein & Shapiro LLP
NEC Corporation
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