Pattern inspection apparatus

Details Pattern inspection apparatus Pattern inspection apparatus

2008-04-08

2008-04-08

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S237200

Reexamination Certificate

active

11298749

ABSTRACT:
The defect confirmation screen of a pattern inspection apparatus that allows the user to create a recipe and check defects easily and quickly includes a “map display part” where a wafer map is displayed, an “image display part” where a list of defect images is displayed, a “list display part” where detailed information on defects is displayed and set, and a “graph display part” where a graph is displayed for selected defect items. Those display parts cooperate with each other and change the defect images, defect information list, and defect graph according to selected map information. A classification code, a clustering condition, and a display filter entered using the information described above are registered in a recipe.

REFERENCES:
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 7292327 (2007-11-01), Nara et al.
patent: 2002/0057831 (2002-05-01), Hiroi et al.
patent: 2002/0171051 (2002-11-01), Nakagaki et al.
patent: 2000-161392 (2000-06-01), None

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