Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2008-04-08
2008-04-08
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S223100
Reexamination Certificate
active
07354169
ABSTRACT:
A system and method are used to pattern light using an illumination system, an array of individually controllable components, and a projection system. The illumination system supplies a beam of radiation. The array of individually controllable elements patterns the beam. The array of individually controllable elements comprises mirrors having first and second steps on opposite edges. The projection system projects the patterned beam onto a target portion of an object. In various examples, the object can be a display, a semiconductor substrate or wafer, a flat panel display glass substrate, or the like, as is discussed in more detail below.
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ASML Holding N.V.
Cherry Euncha P.
Sterne Kessler Goldstein & Fox P.L.L.C.
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