Pattern generator part holder

Details Pattern generator part holder Pattern generator part holder

1986-11-20

1988-07-19

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

355 53, 356363, G01B 902

Patent

active

047580917

ABSTRACT:
The present invention provides a part holder for use in a pattern generation apparatus having a reference point which has a constant spatial relationship between itself and a work piece mounted on the part holder. The part holder is comprised of a material having a low coefficient of thermal linear expansion. In one embodiment, the part holder is formed in sections combined with bonding using a suitable adhesive, such as a low out-gassing epoxy. However, single piece construction may be utilized. In order to eliminate variations in the spatial relationship between the part holder and a coordinate system fixed in space resulting from differences in expansion rates between the part holder and the substrate on which it is mounted, kinematic mounting is employed. The resulting part holder maintains a constant distance between the reference point and the work piece.

REFERENCES:
patent: 3786332 (1969-03-01), Hepner et al.
patent: 4383757 (1983-05-01), Phillips
patent: 4534047 (1985-08-01), Deschenaux et al.
patent: 4655594 (1987-04-01), Wittekoek et al.
patent: 4659225 (1987-04-01), Takahashi

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