Pattern generator for integrated circuits and process of generat

Details Pattern generator for integrated circuits and process of generat Pattern generator for integrated circuits and process of generat

1983-11-23

1985-04-30

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Producing plural rows of pictures on photosensitive paper

355 77, G03B 2744, G03B 2732

Patent

active

045140820

ABSTRACT:
A pattern generator for integrated multilayer circuits, comprising a light source (SLI) for each one of the layers, at least one associated reticle (RETMI) bearing patterns to be reproduced thereon and which is transparent to light, and optical means (MPI) for projecting and focusing the image of the patterns on the layer. The generator is characterized in that with a polarizer (POLI) being connected to the source, the reticle comprises a thin layer (GRI) of magnetooptical material with a magnetization which is at right angles to its surface, the image not the patterns being restituted by a light meter (ANALI).

REFERENCES:
patent: 3632205 (1972-01-01), Marcy
patent: 3909130 (1975-09-01), Glaskov et al.
patent: 4110762 (1978-08-01), Tigreat
patent: 4362385 (1982-12-01), Lobach
IEEE Transaction on Electron Devices, 1981, vol. ED-28, pp. 1416-1421.

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