Pattern generator

Details Pattern generator Pattern generator

1981-12-04

1985-03-12

Albritton, C. L.

Electric heating

Metal heating

By arc

219219, 219121LU, 219121LW, 219121LY, B23K 2700

Patent

active

045047260

ABSTRACT:
A pattern generator in which a workpiece to be machined into a desired pattern shape is held in vacuum and is irradiated with a laser beam condensed to be fine, while scanning the laser beam so as to depict the desired pattern shape, whereby the workpiece is directly machined in conformity with the desired pattern shape. As the workpiece, one in which a shading film (for example, chromium film) is deposited on a transparent glass substrate is employed, and it is irradiated with the laser beam in the vacuum, whereby the irradiated parts of the shading film are vaporized to fabricate a shading mask pattern of good quality.

REFERENCES:
patent: 3560258 (1971-02-01), Brisbane
patent: 3569993 (1971-03-01), Blin
patent: 3889272 (1975-06-01), Lov et al.
patent: 4190759 (1980-02-01), Hongo et al.
patent: 4215694 (1980-08-01), Isakov et al.
patent: 4278867 (1981-07-01), Tan
patent: 4316073 (1982-02-01), Lemelson
patent: 4328410 (1982-05-01), Slivinsky et al.

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