Pattern generating apparatus

Electricity: motive power systems – Reciprocating or oscillating motor – Energizing winding circuit control

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Details

310 15, 310 30, 310 34, 310 35, H02K 3314

Patent

active

039769232

ABSTRACT:
Integrated circuit mask patterns are laser machined by mounting substrates on a support that is periodically stepped in a y direction after each scan by a laser writing beam in an x direction. X-direction scanning is accomplished by mounting a mirror on a carriage that reciprocates by rebounding between two displaced coil springs. A coding laser beam is reflected from the carriage through a stationary code plate, comprising alternate transparent and opaque stripes, to monitor the position of the carriage and to control the modulation of the writing beam.

REFERENCES:
patent: 2268687 (1942-01-01), Young
patent: 2480451 (1949-08-01), DeLaTorre
patent: 3450215 (1969-06-01), Emery
patent: 3840789 (1974-10-01), Dion

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