Pattern formed body and method for manufacturing same

Details Pattern formed body and method for manufacturing same Pattern formed body and method for manufacturing same

2006-06-22

2011-10-18

Hess, Bruce H (Department: 1785)

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

C438S008000, C438S009000, C438S030000, C438S057000, C438S308000, C430S270100, C430S271100

Reexamination Certificate

active

08039092

ABSTRACT:
A main object of the present invention is to provide a pattern formed body capable of forming highly precise functional parts on various base materials, and a method for manufacturing the same. To achieve the object, the present invention provides a method for manufacturing a pattern formed body, having a plasma radiating step of radiating plasma to a patterning substrate having: a base material; an intermediate layer formed on the base material and containing a silane coupling agent or a polymer of the silane coupling agent; and a resin layer formed in a pattern form on the intermediate layer, wherein a fluorine gas is used as an introduction gas to radiate the plasma from the resin layer side.

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