Pattern defect inspection method and its apparatus

Details Pattern defect inspection method and its apparatus Pattern defect inspection method and its apparatus

2007-04-17

2007-04-17

Luebke, Renee (Department: 2875)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

C250S307000, C250S311000, C356S237200, C356S237500

Reexamination Certificate

active

10765920

ABSTRACT:
The pattern defect inspection apparatus and its method of the present invention comprises: a recipe setting unit for setting an inspection recipe and/or a review recipe; an illumination optical system including: a laser light source for emitting ultraviolet laser light; a quantity-of-light adjusting unit for adjusting a quantity of the ultraviolet laser light emitted from the laser light source; and an illumination range forming unit for forming on a sample an illumination range of the ultraviolet laser light; a coherence reducing system; and a detection optical system including: a condensing optical system; a diffracted-light control optical system; and a detecting unit.

REFERENCES:
patent: 5479252 (1995-12-01), Worster et al.
patent: 6621571 (2003-09-01), Maeda et al.
patent: 6800859 (2004-10-01), Shishido et al.
patent: 2001/0025924 (2001-10-01), Uto et al.
patent: 2002/0067477 (2002-06-01), Morita et al.
patent: 8-320294 (1996-12-01), None
patent: 61-212708 (1996-12-01), None
patent: 10-78668 (1998-03-01), None
patent: 2001-176942 (2001-06-01), None
patent: 2001-194323 (2001-07-01), None
patent: 2001-296570 (2001-10-01), None

Affiliated with

Also associated with

Rating

Pattern defect inspection method and its apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pattern defect inspection method and its apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pattern defect inspection method and its apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3740732