Pattern defect detection device and a spatial frequency filter u

Details Pattern defect detection device and a spatial frequency filter u Pattern defect detection device and a spatial frequency filter u

1991-11-06

1994-02-22

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356237, 356239, 356347, G01B 902

Patent

active

052892603

ABSTRACT:
A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen

REFERENCES:
patent: 3970841 (1976-07-01), Green
patent: 4000949 (1977-01-01), Watkins
patent: 4330775 (1982-05-01), Iwamoto et al.
patent: 4806774 (1989-02-01), Lin et al.
patent: 4929081 (1990-05-01), Yamamoto et al.
patent: 5067812 (1991-11-01), Sugimura et al.

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