Pattern data generating system

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G06F 1100

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059236787

ABSTRACT:
A pattern data generating system solves a problem of a conventional pattern data generating system in which the total processing time is prolonged. The present pattern data generating system includes a parallel processing number calculator for computing the number of parallel processes to be used by a region divider that sequentially distributes the split pattern data. A group of pattern data generators generate pattern data in parallel processes. A pattern data combiner combines the pattern data output from the pattern data generators. A parallel processing controller controls the processing.

REFERENCES:
"VLSI Electron Beam Data Verification and check system." Mitsubishi Denki Gihou, vol. 68, No. 3 (1994) pp. 86(288)-89(291).

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