Pattern data converting method and apparatus

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S145000, C382S147000, C382S149000, C382S282000, C356S237100, C700S121000

Reexamination Certificate

active

07020321

ABSTRACT:
A pattern data converting method comprises reconstructing the design data into column regions, segmenting the column region into apparatus strips, and extracting unit data of the design data for each apparatus strip, wherein reconstructing the design data includes defining an rectangular region start code and a rectangular region end code to the rectangle regions, collating the rectangular region start and end codes, dividing the rectangular regions at the Y coordinate of the other rectangular region, and subjecting the rectangular region start code and rectangular region end code having the same Y coordinates to the region operation.

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patent: 5404410 (1995-04-01), Tojo et al.
patent: 5886943 (1999-03-01), Sekiguchi et al.
patent: 6285783 (2001-09-01), Isomura et al.
patent: 6598185 (2003-07-01), Matsui et al.
patent: 6674889 (2004-01-01), Takayama
patent: 11-194480 (1999-07-01), None

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