Patterened mirror vertical cavity surface emitting laser

Details Patterened mirror vertical cavity surface emitting laser Patterened mirror vertical cavity surface emitting laser

1992-03-26

1993-11-02

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

372 45, 437 38, 437129, H01L 2120

Patent

active

052583163

ABSTRACT:
VCSELs including a central active layer with upper and lower mirror stacks wherein a circular trench is formed in one mirror stack to define a lasing area. The trench reduces reflectivity to prevent lasing outside the operating area and an oxygen implant in the trench confines current distribution to maximize power output and efficiency. The trench allows self-alignment throughout most of the manufacturing process.

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Geels et al. "Submilliamp threshold Vertical Cavity Laser-Diodes", Appl. Phys. Letts. 57(1990), pp. 1605-1607.
Geels et al., "Low threshold Planarised Vertical-Cavity surface-emitting lasers", IEEE Photonics Technology Letters 2(1990), pp. 234-236.
Yang et al., "Low threshold operation of a GaAs Single Quantum well mushroom structure surface-Emitting Laser", Appl. Phys. Letts. 58(1991), pp. 1780-1782.

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