Optics: measuring and testing – By light interference
Reexamination Certificate
2005-01-25
2005-01-25
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By light interference
75
Reexamination Certificate
active
06847452
ABSTRACT:
Beam shear can be reduced in an interferometric system by conditioning an input beam prior to directing the input beam to an interferometer. Accordingly, apparatus and methods for conditioning an interferometer input beam are disclosed.
REFERENCES:
patent: 4606638 (1986-08-01), Sommargren
patent: 4662750 (1987-05-01), Barger
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4790651 (1988-12-01), Brown et al.
patent: 4802765 (1989-02-01), Young et al.
patent: 4859066 (1989-08-01), Sommargren
patent: 4881816 (1989-11-01), Zanomi
patent: 5064289 (1991-11-01), Bockman
patent: 5114234 (1992-05-01), Otsuka et al.
patent: 5187543 (1993-02-01), Ebert
patent: 5408318 (1995-04-01), Slater
patent: 5491550 (1996-02-01), Dabbs
patent: 5724136 (1998-03-01), Zanoni
patent: 5757160 (1998-05-01), Kreuzer
patent: 5764361 (1998-06-01), Kato et al.
patent: 5781277 (1998-07-01), Iwamoto
patent: 5781297 (1998-07-01), Castore
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6134007 (2000-10-01), Naraki et al.
patent: 6201609 (2001-03-01), Hill et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6236507 (2001-05-01), Hill et al.
patent: 6271923 (2001-08-01), Hill
patent: 6304318 (2001-10-01), Matsumoto
patent: 6313918 (2001-11-01), Hill et al.
patent: 6541759 (2003-04-01), Hill
patent: 20030053074 (2003-03-01), Hill
patent: 7-351078 (1995-12-01), None
patent: 8-117083 (1996-04-01), None
patent: 10 260009 (1998-09-01), None
Badami, V.G. et al. “Investigation of Nonlinearity in High Accuracy Heterodyne Laser Interferometry.”American Society for Precision Engineering 1997 Proceedings,16:pp. 153-156, 1997.
Bennett, S.J. “A Double-Passed Michelson Interferometer.”Optics Communications,4:6, pp. 428-430, 1972.
Bobroff, Norman. “Recent advances in displacement measuring interferometry.”Meas. Sci. Technol,4: pp. 907-926, 1993.
Hines, Brad et al. “Sub-Nanometer Laser Metrology—Some Techniques and Models.”European Southern Observatory, ESO Conference,pp. 1195-1204, 1991.
Oka, K. et al. “Polarization heterodyne interferometry using another local oscillator beam.”Optics Communications,92:pp 1-5, 1992.
Wu, Chien-Ming. Analytical modeling of the periodic nonlinearity in heterodyne interferometry.Applied Optics,37:28 pp. 6696-6700, 1998.
Fish & Richardson P.C.
Lee Andrew H.
Smith Zandra V.
Zygo Corporation
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