Passive temperature compensation technique for MEMS devices

Measuring and testing – Instrument proving or calibrating – Speed – velocity – or acceleration

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S504120

Reexamination Certificate

active

06959583

ABSTRACT:
In an exemplary embodiment, a MEMS sensor using a passive temperature compensation technique may provide an uncompensated sense output. Additionally, a circuit coupled to the MEMS sensor may include a diode having a voltage drop. A compensated sense output may be formed by combining the uncompensated sense output with a diode output that is proportional to the voltage drop across the diode.

REFERENCES:
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5361637 (1994-11-01), Judd et al.
patent: 5438410 (1995-08-01), Killpatrick et al.
patent: 5488862 (1996-02-01), Neukermans et al.
patent: 5530342 (1996-06-01), Murphy
patent: 5635638 (1997-06-01), Geen
patent: 5756895 (1998-05-01), Kubena et al.
patent: 5806364 (1998-09-01), Kato et al.
patent: 5872313 (1999-02-01), Zarabadi et al.
patent: 5895851 (1999-04-01), Kano et al.
patent: 5908986 (1999-06-01), Mitamura
patent: 5920012 (1999-07-01), Pinson
patent: 5987986 (1999-11-01), Wyse et al.
patent: 6109105 (2000-08-01), Kubena et al.
patent: 6122961 (2000-09-01), Geen et al.
patent: 6236281 (2001-05-01), Nguyen et al.
patent: 6251698 (2001-06-01), Lefort et al.
patent: 6267008 (2001-07-01), Nagao
patent: 6272925 (2001-08-01), Watson
patent: 6311555 (2001-11-01), McCall et al.
patent: 6311556 (2001-11-01), Lefort et al.
patent: 6430403 (2002-08-01), Kossor
patent: 0 661 521 (1995-07-01), None
patent: 0 675 340 (1995-10-01), None
patent: WO 01/27026 (2001-04-01), None
White, Robert D., “Effects of Impact and Vibration on the Performance of a Micromachined Tuning Fork Gyroscope,” Thesis, Massachusetts Institute of Technology, Jun. 1999, pp. 1-55.
“Overview—Electronics for Coriolis Force and Other Sensors/Patent No. 5481914, Issued Jan. 9, 1996,” date unknown, pp. 1-2.
Shakouri, Ali, based on the notes by Petersen, Stephen, University of California, Santa Cruz, Electrical Engineering Department, Analog Electronics Laboratory, date unknown, pp. 1-4.
“Switching Time of a Diode,” http://www.csee.umbc.edu/˜plusquel/v1sill/slides/diode3.html , Jan. 24, 2002, pp. 1-12.
International Search Report for PCT/US03/13308 mailed Dec. 12, 2003.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Passive temperature compensation technique for MEMS devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Passive temperature compensation technique for MEMS devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Passive temperature compensation technique for MEMS devices will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3501599

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.