Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting
Reexamination Certificate
2007-09-11
2007-09-11
Lee, Richard K. (Department: 2832)
Electrical resistors
Resistance value responsive to a condition
Gas, vapor, or moisture absorbing or collecting
C338S028000, C073S023200, C073S024010, C528S025000
Reexamination Certificate
active
11335044
ABSTRACT:
A hydrogen detecting system is characterized by a passive surface acoustic wave (SAW) sensor. The sensor includes a piezoelectric substrate having a self assembled monolayer arranged on at least a portion of the substrate to create a hydrophobic surface. A palladium nanocluster thin film is deposited on the monolayer and an interdigital SAW transducer is disposed upon the piezoelectric substrate for conversion of an RF signal into an acoustic wave and vice versa. At least one additional SAW element is also disposed on the substrate and spaced from the SAW transducer. The SAW element receives a signal from the SAW transducer and produces a response signal. The response signal is modified by the palladium nanocluster film due to a change in conductivity of the palladium nanocluster film upon exposure to hydrogen. This change in the response signal is measured by an interrogator, and yields a measure of the hydrogen concentration to which the sensor was exposed.
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Hines Jacqueline H.
Solie Leland P.
Applied Sensor Research & Development Corporation
Lee Richard K.
Schiff & Hardin LLP
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