Passive electrostatic vacuum particle collector

Details Passive electrostatic vacuum particle collector Passive electrostatic vacuum particle collector

1989-07-26

1990-05-29

Nozick, Bernard

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

55154, 553852, B65H 100

Patent

active

049291394

ABSTRACT:
Disclosed are passive electrostatic particle collectors (10 & 12) for use in vacuum chambers (24 & 32) especially for a particle beam machine system (30 & 36) to collect particulates, such as dust and debris, generated by moving parts (16) within such chambers (24 & 32). These electrostatic particle collectors (10 & 12) comprise Tourmaline crystals (12) mounted on a bracket plate (10) and strategically located where dust and debris are generated. Also disclosed is a method of removing particulate material in vacuum chambers generated by moving parts by passive electrostatic particle collectors.

REFERENCES:
patent: 3087500 (1963-04-01), Jacobson
patent: 3702526 (1972-11-01), Eichmeier
Benesch/Wohrmann, Toramalli, Sep./Oct. 1985, The Mineralogical Record, vol. 16, pp. 331-338.

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